楼主有什么新进展没有?呵呵,今天有空在网上检索了一下,这台镜子原来是检测晶片专用的,原配的有明暗场和DIC功能,只是原厂说明书太难找了。
INM20, Automated Wafer Inspection Microscope
Leica INM20
Microscope Type Upright
Microscope Configuration Brightfield, Darkfield & DIC
Illumination Type Reflected Light
Binocular Angle Variable
Eyepieces:
Model WPK
Magnification 10 X
Field Number 20 mm
Focusing YES
Wafer Size 200.00 mm (7.87 in)
Magnification Changer 1.0, 2.5
Motorized Nosepiece YES
Stage Area:
Length: 254 mm (10.000 in)
Width: 242 mm (9.528 in)
Multiple Objectives Models:
PLAN FLUOR LWD 5X/0.10 EPI
PLAN FLUOR LWD 10X/0.20 EPI IK
PLAN FLUOR XLWD 20X/0.40 EPI IK
PLAN FLUOR LWD 50X/0.60 EPI IK
PLAN FLUOR LWD 100X/0.70 EPI IK
PLAN APO 150X/0.95 EPI IK
Infinity Corrected Objectives YES
Illumination Power Watts: 100
Power Supply Included YES
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